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Microfabrication
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History of the museum
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The COPL has clean room infrastructures that allow it to offer microfabrication services to researchers and companies. While some standard equipment is made available to external users, other more specialized ones are operated by expert technicians whose training and experience will allow customers to take full advantage of all the features available. Contact us for an assessment of the feasibility of your project.
Infrastructures
Centrifugal deposit
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Spincoating spinners
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Cleaning, chemical etching and thermal annealing stations
Photolithography
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Mask aligner for 365nm exposure
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Resolution of 0.8 μm
Reactive ion etching
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2 PlasmaTherm 790 systems for quartz and chalcogenides
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Substrates from 50 to 200 mm
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Etching rate 20 nm/min
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Depth up to 1 μm
Examples of realizations
Microcircuits, Conductive Surfaces and Masks
Printing custom shapes and microcircuits on glass, polymer and silicon substrates
Diffractive Elements
Diffraction gratings with pitch and depth adjusted to your needs
